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型番：ATLEX-1000-L　メーカー：ATL Lasertechnik GmbH　商品コード：L003808

Industrial Excimer Laser: ATLEX-1000-L

Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L
Industrial Excimer Laser: ATLEX-1000-L

波長: 193nm-248nm
出力: 8.0W-10.0W
パルスの最大繰返し: < 100Hz - 1000Hz
エネルギー: 10mJ-15mJ
パルス幅: 5 – 8 ns
ビーム径: (V x H) 6 x 4 mm
拡がり角: (V x H) 2 x 1 mrad
エネルギー安定性: < 2 %
重さ: 70 kg
冷却方法: Cooling Air / Optional Liquid

New Industrial Excimer Laser


【Main features】

TMC (Total-Metal-Ceramic) Vessel
Corona Preionization
Solid state switch
Extended Dynamic & Static Gas-Lifetime (Several Months)
Laser Head Volume 6 l
Air Cooled / Optional Liquid Cooled
RS-485, RS232, USB and fiber optic Interface for system integration
Flushable optics holder
Integrated 4-Valve System for Easy Gas Handling
Dynamic fan speed controls
Meets European CE-standard, RoHS compliant
Modular Design / Service Friendly


【Specifications】

Gas Medium: ArF, KrF
High Voltage Switching Technique: Solid State Switch
Max. Rep Rate: 1000 Hz
Power requirement: 230 VAC / 10 A / 1 Phase / 50-60 Hz

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