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型番：ATLEX-300-I　メーカー：ATL Lasertechnik GmbH　商品コード：L003804

Excimer Laser: ATLEX-300-I

Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I
Excimer Laser: ATLEX-300-I

波長: 157nm-351nm
出力: 0.2W-4.0W
パルスの最大繰返し: < 100Hz - 1000Hz
エネルギー: 1mJ-15mJ
パルス幅: 5 – 8 ns
ビーム径: (V x H) 4 x 6 mm
拡がり角: (V x H) 1 x 2 mrad
エネルギー安定性: < 3 %
重さ: 60 kg
冷却方法: Cooling Air / Optional Liquid

A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications


【Main features】

Soft corona preionization
HV-solid state pulser
Laser head volume < 3l
TMC (Total-Metal-Ceramic) Vessel
Integrated vacuum pump & halogen filter
Air Cooled / Optional Liquid Cooled, active thermal management
RS-485, RS232, USB and fiber optic Interface for system integration
Flushable optics holder
Energy stabilization mode
Dynamic fan speed controls
Meets European CE-standard
RoHS compliance


【Specifications】

Gas Medium: F2, ArF, KrF, XeCl, XeF
High Voltage Switching Technique: Solid State Switch
Max. Rep Rate: 300Hz
Power requirement: 230 VAC / 6,3 A / 1 phase / 50-60 Hz


【Applications】

Micromachining
Laser ablation
Medicine (refractive surgery)
Spectroscopy
Metrology

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